Diffusion of nitrogen implanted in titanium nitride (TiN1-x)
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Revue de Physique Appliquée
سال: 1990
ISSN: 0035-1687
DOI: 10.1051/rphysap:0199000250110111300